JPH01168550U - - Google Patents
Info
- Publication number
- JPH01168550U JPH01168550U JP6611088U JP6611088U JPH01168550U JP H01168550 U JPH01168550 U JP H01168550U JP 6611088 U JP6611088 U JP 6611088U JP 6611088 U JP6611088 U JP 6611088U JP H01168550 U JPH01168550 U JP H01168550U
- Authority
- JP
- Japan
- Prior art keywords
- growth chamber
- vacuum
- forming apparatus
- film forming
- stray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000005855 radiation Effects 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6611088U JPH01168550U (en]) | 1988-05-18 | 1988-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6611088U JPH01168550U (en]) | 1988-05-18 | 1988-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168550U true JPH01168550U (en]) | 1989-11-28 |
Family
ID=31291526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6611088U Pending JPH01168550U (en]) | 1988-05-18 | 1988-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168550U (en]) |
-
1988
- 1988-05-18 JP JP6611088U patent/JPH01168550U/ja active Pending
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